Open Access
Issue
E3S Web Conf.
Volume 88, 2019
i-DUST 2018 – Inter-Disciplinary Underground Science & Technology
Article Number 05001
Number of page(s) 9
Section Microelectronics Devices and Systems
DOI https://doi.org/10.1051/e3sconf/20198805001
Published online 22 February 2019

© The Authors, published by EDP Sciences, 2019

Licence Creative CommonsThis is an open access article distributed under the terms of the Creative Commons Attribution License 4.0 (http://creativecommons.org/licenses/by/4.0), which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.