Open Access
E3S Web Conf.
Volume 12, 2016
i-DUST 2016 – Inter-Disciplinary Underground Science & Technology
Article Number 04003
Number of page(s) 6
Section Microelectronics Materials, Devices and Systems
Published online 05 December 2016

© The Authors, published by EDP Sciences 2016

Licence Creative Commons
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0 (