Open Access
| Issue |
E3S Web Conf.
Volume 12, 2016
i-DUST 2016 – Inter-Disciplinary Underground Science & Technology
|
|
|---|---|---|
| Article Number | 04003 | |
| Number of page(s) | 6 | |
| Section | Microelectronics Materials, Devices and Systems | |
| DOI | https://doi.org/10.1051/e3sconf/20161204003 | |
| Published online | 05 December 2016 | |
- P. Eyben, W. Vandervorst, D. Alvarez, M. Xu, and M. Fouchier, Scanning Probe Microscopy, Springer, New York, 31 (2007) [Google Scholar]
- R. Coq Germanicus, E. Picard, B. Domenges, K. Danilo and R. Rogel, Applied Surf. Sci. 253, 6006 (2007) [CrossRef] [Google Scholar]
- L. Leyssenne, S. Wane, S. Massenot, D. Bajon, R. Coq-Germanicus, P. Descamps and G. Audoit, ICEAA 1032 (2013) [Google Scholar]
- Ph. Leclère, P. Viville, M. Jeusette, J.P. Aimé and R. Lazzaroni, In Scanning Probe Microscopies: beyond imaging, 175 (Wiley-VCH, 2006) [CrossRef] [Google Scholar]
- Y. Gan, Surface Sci. Rep. 64, 99 (2009) [CrossRef] [Google Scholar]
- L. Vázquez, R.C. Salvarezza, P. Herrasti, P. Ocón, J.M. Vara and A.J. Arvia, Applied Surf. Sci. 70 (1993) [Google Scholar]
- R.R.L. De Oliveira, D.A.C. Albuquerque, F.L. Leite, F.M. Yamaji, and T.G.S. Cruz, Measurement of the nanoscale roughness by atomic force microscopy: basic principles and applications INTECH (2012) [Google Scholar]
- B.K. Kim, S.J. Lee, J.Y. Kim, K.Y. Ji, Y.J. Yoon, M.Y. Kim, S.H. Park, and J.S. Yoo, Journal of Electr. Mat., 37(4), 527 (2008) [CrossRef] [Google Scholar]
- J. Wojewoda-Budka, Z. Huber, L. Litynska-Dobrzynska, N. Sobczak and P. Zieba, Mat. Chem. and Phys. 139, 276 (2013) [CrossRef] [Google Scholar]
- N.C. De Souza, J.R Silva, M.A. Pereira-da-Silva, M. Raposo, R.M. Faria, J.A. Giacometti, Journal of Nanosci. and Nanotech, 4(5), 548 (2004) [CrossRef] [PubMed] [Google Scholar]
- A.P. Pentland, IEEE transactions on pattern analysis and machine intelligence, 6, 661 (1984) [CrossRef] [PubMed] [Google Scholar]
- F. Biscarini, P. Samori, A. Lauria, P. Ostoja, R. Zamboni, C. Taliani, P. Viville, R. Lazzaroni and J.L. Bredas, Thin Solid Films, 284, 439 (1996) [CrossRef] [Google Scholar]
- T. Vicsek, Fractal growth phenomena 2, Singapore: World scientific (1992) [CrossRef] [Google Scholar]